The influence of abrasive size on high-pressure chemical mechanical polishing of sapphire wafer
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چکیده
منابع مشابه
the influence of the neo-platonic concept of poetic imagination on wordsworth’s poetry
بر اساس نظریه افلاطون در باره شعر خلاقیت هنری مورد انتقاد قرار گرفته است. نظریه کلی در مورد شعر این بود که شعر از ظواهرتقلید میکند و نه حقیقت. چون سایه ای از حقیقت است. اما با پیدایش فلسفه نو افلاطونی، انتقاتات قبلی در مورد شعر و شاعری اصلاح شد. فلوطین در کتاب انئید، اساس خلق هنری را بر محور مُثل افلاطونی قرار داد. وی باور داشت که هنر مندان در خلق آثار هنری، تحت تاثیر مُثل افلاطونی بوده و عوالمی ...
Wafer Scale Variation of Planarization Length in Chemical Mechanical Polishing
Chemical mechanical polishing (CMP) is widely used for pla-narization of advanced interconnect and shallow trench isolation structures in integrated circuit manufacture. Of particular concern is within-die variation in the interlevel dielectric or oxide thickness remaining after polish, due to pattern density variations across the die. 1 Recent modeling of CMP has shown that a " planarization l...
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Silica sol nano-abrasives with large particle are prepared and characterized by TEM, PCS and Zeta potential in this paper. Results show that the silica sol nano-abrasives about 100nm are of higher stability (Zeta potential: -65mV) and narrow distribution of particle size. And then alkali CMP slurries for tungsten containing self-made silica sol nanoabrasives are prepared and applied. CMP result...
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Axiomatic Design was used to develop a complete platform for chemical mechanical polishing (CMP) of silicon wafers. A functional requirement of the machine emerging from the axiomatic design process is the control of the wafer-scale polishing uniformity. Mechanisms to maintain control of the uniformity were designed, and integrated into a wafer carrier, which holds the wafer during polishing an...
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ژورنال
عنوان ژورنال: International Journal of Precision Engineering and Manufacturing-Green Technology
سال: 2015
ISSN: 2288-6206,2198-0810
DOI: 10.1007/s40684-015-0020-0